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专利名称：Method of determining alignment of a
template and a substrate having a liquiddisposed therebetween
发明人：Sidlgata V. Sreenivasan,Byung-Jin
Choi,Matthew E. Colburn,Todd C. Bailey
申请号：US10805916申请日：20040322公开号：US071883B2公开日：20070306
摘要：The present invention includes a method of aligning a substrate and a templatespaced-apart from the substrate with an activating light curable liquid disposed
therebetween, the substrate having substrate alignment marks and the template havingtemplate alignment marks, the method including, reducing a distance between thesubstrate and the template to cause a spreading of the activating light curable liquid; andvarying an overlay placement of the template with respect to the substrate such that thetemplate alignment marks are substantially aligned with the substrate alignment marksbefore the spreading causes the activating light curable liquid to cover an area betweenthe substrate alignment marks and the template alignment marks.
申请人：Sidlgata V. Sreenivasan,Byung-Jin Choi,Matthew E. Colburn,Todd C. Bailey
地址：Austin TX US,Round Rock TX US,Hopewell Junction NY US,Fishkill NY US
国籍：US,US,US,US
代理机构：Fish & Richardson P.C.
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